1. Two PLD systems

       2. DC Supttering system

 - Oxides films

 - Nd:YAG laser (355 nm)

 - Tubo pump (5x10^-7 Torr),  - Substrate heater ~ 900 ⁰C

 - Metal & alloy films

 - 3 guns

 - Multilayer deposition

 - Turbo pump( 2x10^-7 Torr)

        3. PLD & Sputtering System

       4. Three electric Furnaces

 - Metal & oxides films

 - Tubo pump(5x10^-7 Torr),  - Substrate heater : 750 ⁰C 

 - Tube furnace

    Temp = 1400 ⁰C & 1200 ⁰C

  - Box furnace      

   Temp.= 1200 ⁰C

         1. Structural analysis

       2. Surface analysis

 - X-ray diffraction

 - 전자현미경&FIB

   (고체공동실험실)

  Scanning Probe Microscopy

3. Electrical & Optical measurement

       4. Magnetic measurement

- R(T), R(H) : 4 K ~320 K

   I-V measurement

   Hall measurement

- Photoconductance    Photovoltaic effect

 - P-E, C-V measurement

- Magnetoresistance

   15 K ~ 475 K, H = 15 kOe

 - Longitudinal & Polar MOKE

   H = 3 kOe

 - polar MOKE microscope